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Publications
| Citation key | Rotheudt.2018 |
|---|---|
| Author | Rotheudt, Hansjörg and Lichtner, Eugen and Brockmann, Gerrid and Hofer, Valeria and Askan, Tunc and Hartmann, Anne and Zielke, Benjamin and Kriegel, Martin |
| Title of Book | In Conference Proceedings: 24th International Symposium on Contamination Control and Cleanroom Technology ISCC 2018, The Hague, Netherlands, 23.-26.09.2018 |
| Pages | 156–166 |
| Year | 2018 |
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