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Publications
Citation key | Rotheudt.2018 |
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Author | Rotheudt, Hansjörg and Lichtner, Eugen and Brockmann, Gerrid and Hofer, Valeria and Askan, Tunc and Hartmann, Anne and Zielke, Benjamin and Kriegel, Martin |
Title of Book | In Conference Proceedings: 24th International Symposium on Contamination Control and Cleanroom Technology ISCC 2018, The Hague, Netherlands, 23.-26.09.2018 |
Pages | 156–166 |
Year | 2018 |
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